SJ/T 31062-1994
Requirements of readiness and methods of inspection and assessment for RD4500 hydroextractors (English Version)

Standard No.

SJ/T 31062-1994

Language

Chinese, Available in English version

Published By

Professional Standard - Electron

Status

Withdraw 2010-02

Latest

SJ/T 31062-1994

Scope

This standard specifies the integrity requirements and inspection and evaluation methods of the RD-4500 centrifugal dryer. This standard applies to RD-4500 centrifugal dryer. Similar structure centrifugal dryers used in the production of other semiconductor devices and integrated circuits can also be implemented as a reference.

SJ/T 31062-1994 history

• 1970 SJ/T 31062-1994 Requirements of readiness and methods of inspection and assessment for RD4500 hydroextractors