SJ/T 31132-1994 Requirements of readiness and methods of inspection and assessment for ASM microcomputer-controlled diffusion furnaces (English Version)
This standard specifies the integrity requirements and inspection and evaluation methods of ASM type microcomputer diffusion furnace. This standard applies to ASM type microcomputer diffusion furnace. Other types of microcomputer diffusion furnaces can also be implemented by reference.
SJ/T 31132-1994 history
1970SJ/T 31132-1994 Requirements of readiness and methods of inspection and assessment for ASM microcomputer-controlled diffusion furnaces