SJ/T 31092-1994
Requirements of readiness and methods of inspection and assessment for NC wafer cutting (scribing) machines (English Version)

Standard No.

SJ/T 31092-1994

Language

Chinese, Available in English version

Published By

Professional Standard - Electron

Latest

SJ/T 31092-1994

Scope

This standard specifies the integrity requirements and inspection and assessment methods for wafer CNC cutting (dicing) machines. This standard applies to the ESEC·8003 type CNC cutting (dicing) machine. Other types of CNC cutting (dicing) machines with similar structures can also be implemented with reference to the relevant provisions of this standard.

SJ/T 31092-1994 history

• 1970 SJ/T 31092-1994 Requirements of readiness and methods of inspection and assessment for NC wafer cutting (scribing) machines