SJ/T 10481-1994
Test method for resistivity of silicon epitaxial layers by area contacts three-probe techniques (English Version)
- Standard No.
- SJ/T 10481-1994
- Language
- Chinese, Available in English version
- Release Date
- 1994
- Published By
- Professional Standard - Electron
- Status
- 2010-02
- Latest
- SJ/T 10481-1994
- Scope
- This standard specifies the surface contact three-probe method for measuring the resistivity of silicon epitaxial layers. This standard is applicable to the measurement of resistivity of N/N^(+) or P/P^(+) type silicon epitaxial layers of 0.06-60∩cm.
SJ/T 10481-1994 history
- 1994 SJ/T 10481-1994 Test method for resistivity of silicon epitaxial layers by area contacts three-probe techniques
