This standard specifies the integrity requirements and inspection and evaluation methods of the 4304 type diffusion furnace. This standard applies to type 4304 diffusion furnace. This standard also applies to 4104 and 3103 diffusion furnaces. Other models of diffusion furnaces can also be implemented by reference.
SJ/T 31131-1994 history
1970SJ/T 31131-1994 Requirements of readiness and methods of inspection and assessment for Type 4304 diffusion furnaces