SJ 3244.4-1989 Methods of measurement for profile distribution of carrier concentration of Gallium arsenide and Indium phosphide materials--Electrochemical voltage capacitance method (English Version)
1.1 This standard specifies the principles, instrument and electrolyte requirements, measurement procedures, and calculation of measurement results for electrochemical voltage capacitance method measurement. 1.2 This standard applies to n-type and P-type gallium arsenide and indium phosphide with a carrier concentration of 10^(14)~10(19)cm^(-3). It also applies to aluminum gallium arsenide and gallium indium arsenide phosphide. Measurement of material carrier concentration profile distribution.
SJ 3244.4-1989 history
1989SJ 3244.4-1989 Methods of measurement for profile distribution of carrier concentration of Gallium arsenide and Indium phosphide materials--Electrochemical voltage capacitance method