GB/T 38614-2020
Measuring method for nano positioning and scanning stage based on flexible hinge mechanism and piezo actuator (English Version)
- Standard No.
- GB/T 38614-2020
- Language
- Chinese, Available in English version
- Release Date
- 2020
- Published By
- 国家市场监督管理总局、中国国家标准化管理委员会
- Latest
- GB/T 38614-2020
- Scope
- This standard specifies the measurement conditions, measurement system and measurement methods of a nanopositioning and scanning platform (hereinafter referred to as the platform) based on a flexible hinge mechanism and a piezoelectric ceramic actuator. This standard applies to the research, design, production, testing and use of platforms.
GB/T 38614-2020 Referenced Document
- GB/T 11336 Measurement of departures from straightness
- GB/T 38616-2020 Terminology for nano positioning and scaning stage
GB/T 38614-2020 history
- 2020 GB/T 38614-2020 Measuring method for nano positioning and scanning stage based on flexible hinge mechanism and piezo actuator
