Specifies the terms and definitions, symbols and abbreviations, general principles, test conditions, and test requirements for the output deviation stability measurement method of semiconductor radio frequency power supplies and microwave power supplies. It is suitable for radio frequency power supply and microwave power supply products for semiconductor equipment with electrical operating frequency between 100kHz and 3GHz.
T/GVS 006-2022 history
2022T/GVS 006-2022 Method of measuring output deviation stability for semiconductor RF power supply and microwave power supply