This document specifies the terms and definitions, principles, instruments and reagents, sample processing, instrument calibration, test process, data processing, uncertainty assessment and test reports for testing the phase transition temperature of thin film materials using optical power analysis. This document is suitable for testing the phase change temperature of thin film materials with a thickness of 5nm~100μm. The thin film material should have different light reflectivity before and after phase change and should not decompose or volatilize when heated in the test temperature zone. Materials with a thickness greater than 100μm can refer to the implementation.
T/CSTM 00537-2021 history
2021T/CSTM 00537-2021 Phase transition temperature measurement of micro-nano thin film -Optical power analysis