T/NXCL 017-2022
300 mm heavily phosphorus-doped single crystaline Czochralski silicon polished wafers (English Version)
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T/NXCL 017-2022
Standard No.
T/NXCL 017-2022
Language
Chinese,
Available in English version
Release Date
2022
Published By
Group Standards of the People's Republic of China
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T/NXCL 017-2022
T/NXCL 017-2022 history
2022
T/NXCL 017-2022
300 mm heavily phosphorus-doped single crystaline Czochralski silicon polished wafers
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