JB/T 5630-1991
Diffusion furnace for semiconductor devices. Grading of energy consumption (English Version)
- Standard No.
- JB/T 5630-1991
- Language
- Chinese, Available in English version
- Release Date
- 1992
- Published By
- Professional Standard - Machinery
- Status
- Latest
- JB/T 5630-1991
JB/T 5630-1991 history
- 1992 JB/T 5630-1991 Diffusion furnace for semiconductor devices. Grading of energy consumption
