This standard specifies methods for element identification using Auger electron spectroscopy obtained by ordinary electron spectrometers. This standard applies to the Auger spectrum produced by electrons or X-rays irradiating the sample surface. This standard does not apply to Auger spectra produced by ion excitation.
JB/T 6976-1993 history
1993JB/T 6976-1993 Auger Electron Spectroscopy Element Identification Method