T/CASAS 014-2021
Measuring method for basal plane bending of SiC substrate — High resolution X-ray diffractometry (English Version)
- Standard No.
- T/CASAS 014-2021
- Language
- Chinese, Available in English version
- Release Date
- 2021
- Published By
- Group Standards of the People's Republic of China
- Latest
- T/CASAS 014-2021
T/CASAS 014-2021 history
- 2021 T/CASAS 014-2021 Measuring method for basal plane bending of SiC substrate — High resolution X-ray diffractometry
