JB/T 5631-1991
Epitaxial furnace for semiconductor devices. Energy efficiency standard (English Version)

Standard No.

JB/T 5631-1991

Language

Chinese, Available in English version

Release Date

1992

Published By

Professional Standard - Machinery

Status

Withdraw

Latest

JB/T 5631-1991

JB/T 5631-1991 history

• 1992 JB/T 5631-1991 Epitaxial furnace for semiconductor devices. Energy efficiency standard