ASTM E986-04(2017)
Standard Practice for Scanning Electron Microscope Beam Size Characterization

Standard No.

ASTM E986-04(2017)

Release Date

2017

Published By

American Society for Testing and Materials (ASTM)

Status

Be replaced

Replace By

ASTM E986-04(2024)

Latest

ASTM E986-04(2024)

Scope

1.1 This practice provides a reproducible means by which one aspect of the performance of a scanning electron microscope (SEM) may be characterized. The resolution of an SEM depends on many factors, some of which are electron beam voltage and current, lens aberrations, contrast in the specimen, and operator-instrument-material interaction. However, the resolution for any set of conditions is limited by the size of the electron beam. This size can be quantified through the measurement of an effective apparent edge sharpness for a number of materials, two of which are suggested. This practice requires an SEM with the capability to perform line-scan traces, for example, Y-deflection waveform generation, for the suggested materials. The range of SEM magnification at which this practice is of utility is from 1000 to 50 000 × . Higher magnifications may be attempted, but difficulty in making precise measurements can be expected. 1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. 1.3 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

ASTM E986-04(2017) Referenced Document

• ASTM E7 Standard Terminology Relating to Metallography*， 2022-10-01 Update
• ASTM E766 Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope

ASTM E986-04(2017) history

• 2024 ASTM E986-04(2024) Standard Practice for Scanning Electron Microscope Beam Size Characterization
• 2017 ASTM E986-04(2017) Standard Practice for Scanning Electron Microscope Beam Size Characterization
• 2004 ASTM E986-04(2010) Standard Practice for Scanning Electron Microscope Beam Size Characterization
• 2004 ASTM E986-04 Standard Practice for Scanning Electron Microscope Beam Size Characterization
• 1997 ASTM E986-97 Standard Practice for Scanning Electron Microscope Beam Size Characterization