This standard specifies the principles, instruments and equipment, sample preprocessing, test methods, thickness calculation methods, uncertainty assessment of measurement results and test reports of the atomic force microscope method for measuring the thickness of two-dimensional materials. This standard is applicable to the thickness measurement of two-dimensional materials that can form steps with the substrate.
T/CSTM 00003-2019 history
2019T/CSTM 00003-2019 Thickness measurements of two-dimensional materials Atomic force microscopy (AFM)