JB/T 4082-1991
Sputtering ion pump technical conditions (English Version)
- Standard No.
- JB/T 4082-1991
- Language
- Chinese, Available in English version
- Release Date
- 1991
- Published By
- Professional Standard - Machinery
- Status
- 2012-04
- Replace By
- JB/T 4081-2011
- Latest
- JB/T 4081-2011
- Scope
- This standard specifies the technical requirements, inspection rules, test methods, packaging, storage, etc. for ordinary types of sputter ion pumps. This standard applies to the two-stage (L type) and three-pole (3L type) sputter ion pumps specified in JB/T 4081.
JB/T 4082-1991 history
- 2011 JB/T 4081-2011 Vacuum technology - Sputter ion pump
- 1991 JB/T 4082-1991 Sputtering ion pump technical conditions
JB/T 4082-1991 Sputtering ion pump technical conditions was changed to JB/T 4081-2011 Vacuum technology - Sputter ion pump.
