This International Standard gives a statement of the minimum amount of information required to report the analysis of thin films on substrates using XPS. These analyzes involved measurements of chemical composition and thickness of uniform films, as well as measurements of chemical composition of inhomogeneous films as a function of depth by means of variable angle XPS, XPS sputtering depth profiling, peak shape analysis, and variable photon energy XPS.
GB/T 36401-2018 Referenced Document
ISO 18115-1:2010 Surface chemical analysis - Vocabulary - Part 1: General terms and terms used in spectroscopy
GB/T 36401-2018 history
2018GB/T 36401-2018 Surface chemical analysis—X-ray photoelectron spectroscopy—Reporting of results of thin-film analysis