SJ 1794-1981
General specification for diffusion furnace for semiconductor device manufacturing (English Version)

Standard No.

SJ 1794-1981

Language

Chinese, Available in English version

Release Date

1981

Published By

Professional Standard - Electron

Latest

SJ 1794-1981

SJ 1794-1981 history

• 1981 SJ 1794-1981 General specification for diffusion furnace for semiconductor device manufacturing