YS/T 14-1991
Method for measuring the thickness of heteroepitaxial layer and silicon polycrystalline layer (English Version)

Standard No.

YS/T 14-1991

Language

Chinese, Available in English version

Release Date

1991

Published By

Professional Standard - Non-ferrous Metal

Status

Be replaced 2015-10

Replace By

YS/T 14-2015

Latest

YS/T 14-2015

YS/T 14-1991 history

• 2015 YS/T 14-2015 Method for measuring the thickness of heteroepitaxial layer and silicon polycrystalline layer
• 1991 YS/T 14-1991 Method for measuring the thickness of heteroepitaxial layer and silicon polycrystalline layer