NF C96-050-17*NF EN 62047-17:2015
Semiconductor devices - Micro-electromechanical devices - Part 17 : bulge test method for measuring mechanical properties of thin films

Standard No.

NF C96-050-17*NF EN 62047-17:2015

Release Date

2015

Published By

Association Francaise de Normalisation

Latest

NF C96-050-17*NF EN 62047-17:2015

NF C96-050-17*NF EN 62047-17:2015 history

• 2015 NF C96-050-17*NF EN 62047-17:2015 Semiconductor devices - Micro-electromechanical devices - Part 17 : bulge test method for measuring mechanical properties of thin films