T/CSTA 0052-2023
Ultra-high purity stainless steel rods for semiconductor manufacturing equipment (English Version)

Standard No.
T/CSTA 0052-2023
Language
Chinese, Available in English version
Release Date
2023
Published By
Group Standards of the People's Republic of China
Latest
T/CSTA 0052-2023
Scope
This document specifies the classification, ordering content, size, shape, weight, technical requirements, and test methods of ultra-high purity stainless steel rods (general term for round steel, square steel, flat steel, and hexagonal steel, hereinafter referred to as steel rods) for semiconductor manufacturing equipment. , inspection rules, packaging, logos and quality certificates. This document applies to ultra-high purity stainless steel hot-rolled steel bars, cold-drawn blanks and cold-drawn steel bars with dimensions (diameter, side length, thickness or distance between opposite sides, hereinafter referred to as size) not larger than 150mm for valves and steel pipes in semiconductor manufacturing equipment.

T/CSTA 0052-2023 history

  • 2023 T/CSTA 0052-2023 Ultra-high purity stainless steel rods for semiconductor manufacturing equipment



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