IEC 113/133/DTS:2012
IEC 62622, Ed. 1: Nanotechnologies - Description, measurement, and dimensional quality parameters of artificial gratings

Standard No.

IEC 113/133/DTS:2012

Release Date

2012

Published By

International Electrotechnical Commission (IEC)

Status

Withdraw

Replace By

IEC/TS 62622:2012

Replace

IEC 113/123/CD:2011