JEITA EM3603B-2006
Standard of SOI wafers and metrology
Home
JEITA EM3603B-2006
Standard No.
JEITA EM3603B-2006
Release Date
2006
Published By
JP-JEITA
Scope
This standard specifies the standard of thin film SOI wafers for MOS device and their metrology.
Copyright ©2024 All Rights Reserved