KS D 0260-1989(1994)
TESTING METHODS OF RESISTIVITY FOR SINGLE CRYSTAL SILICON WAFERS WITH FOUR-POINT PROBE

Standard No.

KS D 0260-1989(1994)

Release Date

1989

Published By

Korean Agency for Technology and Standards (KATS)

Status

Withdraw

Replace By

KS D 0260-1999

Latest

KS D 0260-1999

KS D 0260-1989(1994) history

• 1999 KS D 0260-1999 TESTING METHODS OF RESISTIVITY FOR SINGLE CRYSTAL SILICON WAFERS WITH FOUR-POINT PROBE
• 0000 KS D 0260-1989(1994)