KS D ISO 19319-2005(2020) Surface chemical analysis-Auger electron spectroscopy and X-ray photoelectron spectroscopy-Determination of lateral resolution, analysis area, and sample area viewed by the analyzer
2005KS D ISO 19319:2005 Surface chemical analysis-Auger electron spectroscopy and X-ray photoelectron spectroscopy-Determination of lateral resolution, analysis area, and sample area viewed by the analyzer