DIN EN ISO 23216:2023 Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)
2023DIN EN ISO 23216:2023-01 Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021); German version EN ISO 23216:2022